1. Stainless steel of the vacuum chamber;
2. Ultra low temperature - The temperature is as low as 40 ℃;
3. Omnidirectional surface cleaning - Different plasma can enter the ultra-fine slit for cleaning;
4. Environmental protection - No harmful substances are produced before and after treatment, and keep away from the harmful solvents to human body;
5. Stability - Continuity and constancy to maintain the stability of machinery and equipment during operation;
6. Cleaning - Remove dust and oil, fine cleaning and static electricity;
7. Excitation - Improve the adhesion ability of the surface and greatly increase the surface energy of the object;
8. Platy stripping - AF / AS layer platy stripping.
Function configuration | Technical parameter | |||
| Model | VP-60L | VP-80L | VP-100L | VP-150L |
| Dimensions (mm) | L=1200; W=920; H=1690 | |||
Vacuum chamber dimensions (mm) | L=403; W=400;H=403 | L=450; W=400;H=450 | L=470; W=460;H=470 | L=500; W=600;H=500 |
Vacuum chamber material | Stainless steel | |||
Electrode plate dimensions (mm) | 319（L）×374（W） | 320（L）×420（W） | 380（L）×440（W） | 520（L）×470（W） |
Electrode plate material | Special aluminum electrode | |||
| Weight(kg) | 560 | 580 | 630 | 680 |
| Control | PLC+ Touch screen | |||
Electrode plate structure | Horizontal 8 layers | |||
| Vacuum pump system | Two-stage rotary plate vacuum pump/ Roots vaccum pump | |||
Vacuum measurement system | Pilani resistance vacuum gauge | |||
Gas measuring system | High precision mass flowmeter | |||
| Plasma generator | High precision 0-500W plasma generator | High precision 0-1000W plasma generator | ||
| Plasma matching unit | High precision 0-500W automatic matching unit | High precision 0-1000W automatic matching unit | ||
| Working vacuum | 10-100 Pa | |||
Limit pressure of vacuum pump | 5×10-1 Pa | |||
Time to achieve vacuum time(s) | ≤ 55 | ≤ 70 | ≤ 80 | ≤ 100 |
Time to release vacuum time(s) | ≤ 15 | ≤ 20 | ≤ 25 | ≤ 30 |
Gas control range (sccm) | Mass flow 0-300 (optional) | Mass flow 0-500 (optional) | ||
Radio frequency power supply (w) | 0-500 （Adjustable in range） | 0-1000（Adjustable in range） | ||
| Mode of operation | Manual, one key automatic operation | |||
| Power supply | Three phase 380V | |||
| Rated power (kw) | 4 | |||
