VP Series Plasma Cleaner
VP-10D Automatic Plasma Cleaner for Semiconductor Industry
Designed for semiconductor packaging industry substrates and lead frames plasma cleaning process.
Typical applications：
1> Plasma treatment before wire bonding on semiconductor package substrates and lead frames
2> Plasma treatment before prefill on packaged chips
3> Pre-Mold Plasma Treatment of Semiconductor Package Substrates and Leads
4> Plasma treatment of semiconductor package substrates and lead frames to improve adhesion
5> Remove/reduce oxide layer on leads
| Functional configuration | Technical parameter | |
| Equipment size | W x L x H | 1020L * 1380W * 1865H |
| Net weight | 400Kg | |
| Equipment perimeter clearance | 800MM on the back, 500MM on both sides | |
| Cavity | Volume | Process chamber volume 8.5L |
| Adapt to product size | Width 50-100mm / Length 150-300mm | |
| Electrode | Electrode size | Top: 320*500mm; Bottom: 320*520mm |
| RF power | Standard power | 1KW |
| Frequency | 13.56MHz | |
| Gas control | Supports up to three channels | Standard 2 channels, optional 3 channels |
| Control System | HMI | PLC + touch screen / PC + touch screen |
| Remote interface | Communication | Optional |
| Vacuum pump | Optional dry pump | 90CFM |
| Optional oil pump | 195CFM | |
| Optional dry pump with purge function | YES | |
| Nitrogen purge flow | 2SLM | |
| Factory facilities | Power supply | AC380V 50/60HZ 4KW (oil pump) / AC380V 50/60HZ 7KW (dry pump) |
| Process Gas Line Size & Type | 1/4inch Swagelok | |
| Process gas purity | Industrial grade and above | |
| Process gas pressure | 10-20 psig | |
| Purge Gas Line Size & Type | 1/4inch Swagelok | |
| Purging gas purity | Industrial grade and above | |
| Purge gas pressure | 15 psig | |
| Pneumatic Valve Line Size & Type | 10mm push-in fitting | |
| Pneumatic gas purity | Compressed air, oil-free, dew point <=7C, particles <5 | |
| Pneumatic gas pressure | 70-90 psig | |
| Compressed air exhaust line | 10mm | |
| Compliance | Certification | SEMI |
| Auxiliary equipment | Nitrogen generator (optional) | Optional when nitrogen purging function is required |
| Chiller (optional) | Optional when configuring the cooling function electrode | |
| Hydrogen Kit (Optional) | Optional when processing with hydrogen | |
| Exhaust gas processor (optional) | Tail gas treatment option for fluorine-containing gas treatment | |
| Transportation | Gross weight | 460kg |
| Number of packages | 1 | |
| Packaging is SPM15 compliant | ||
