VP Series Plasma Cleaner
VP-80L Offline Vacuum Plasma Cleaner
Remove dust and oil; fine cleaning and antistatic; improve surface adhesion; improve surface adhesion reliability and durability; AF/AS layer stripped.
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Functional configuration | Technical parameter | ||||
Model | VP-60L | VP-80L | VP-100L | VP-150L | |
Dimensions (mm) | L=1200 W=920 H=1690 | ||||
Inner size of vacuum chamber (mm) | L=403 W=400 H=403 | L=450 W=400 H=450 | L=470 W=460 H=470 | L=500 W=600 H=500 | |
Vacuum chamber material | Stainless steel | ||||
Electrode plate rulerInch (mm) | 319 (L) × 374 (W) | 320 (L) × 420 (W) | 380 (L) × 440 (W) | 520 (L) × 470 (W) | |
Electrode plate material | Special aluminum electrode | ||||
Weight | 560KG | 580KG | 630KG | 680KG | |
Control | PLC + touch screen | ||||
Electrode plate structure | Level 8 | ||||
Vacuum pump system | Two-stage oil rotary vane vacuum pump, Roots vacuum pump set | ||||
Vacuum measurement system | Pirani Resistance Vacuum Gauge | ||||
Gas measurement system | High Precision Mass Flow Meter | ||||
Plasma generator | High Precision 0-500W Plasma Generator | High precision 0-1000W plasma Generator | |||
Plasma matcher | High Precision 0-500W Automatic Matcher | High precision 0-1000W automatic matcher | |||
Working vacuum | 10-100Pa | ||||
Vacuum pump ultimate pressure | 5×10-1Pa | ||||
Vacuum time | ≤55S | ≤70S | ≤80S | ≤100S | |
Vacuum breaking time | ≤15S | ≤20S | ≤25S | ≤30S | |
Gas control range | Mass flow 0-300SCCM (optional) | Mass flow 0-500SCCM (optional) | |||
RF power | 0-500W (adjustable within the range) | 0-1000W (adjustable within the range) | |||
Operating mode | Manual pick and place, one-key automatic operation | ||||
Power supply | Three-phase 380V | ||||
Total power | 4KW | 4.5KW |