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VP-80L Offline Vacuum Plasma Cleaner

product description: Removal of dust and oil; fine cleaning and destabilization; improved surface adhesion; improved reliability and durability of surface bonding; AF/AS layer deplating.
Fabric:
model: VP-80L
application:
TEL: 400-660-7690 turn 1

product description:

VP Series Plasma Cleaner

VP-80L Offline Vacuum Plasma Cleaner


Remove dust and oil; fine cleaning and antistatic; improve surface adhesion; improve surface adhesion reliability and durability; AF/AS layer stripped.


  • The vacuum chamber is made of stainless steel;

  • Ultra-low temperature: the temperature is as low as 40 degrees;

  • All-round surface cleaning: the anisotropic plasma can enter the ultra-fine slit for cleaning;

  • Environmental protection: no harmful substances are produced before and after treatment, and it is far away from the harm of harmful solvents to the human body;

  • Stability: Continuity and constancy to maintain the stability of machinery and equipment during operation;

  • Cleaning: remove dust and oil, fine cleaning and antistatic;

  • Activation: improve the adhesion of the surface, the surface energy of the object is greatly increased;

  • Deplating: AF/AS layer deplating.

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Functional configurationTechnical parameter
ModelVP-60LVP-80LVP-100LVP-150L
Dimensions (mm)L=1200 W=920 H=1690
Inner size of vacuum chamber (mm)L=403 W=400 H=403L=450 W=400 H=450L=470 W=460 H=470L=500 W=600 H=500
Vacuum chamber materialStainless steel
Electrode plate rulerInch (mm)319 (L) × 374 (W)320 (L) × 420 (W)380 (L) × 440 (W)520 (L) × 470 (W)
Electrode plate materialSpecial aluminum electrode
Weight560KG580KG630KG680KG
ControlPLC + touch screen
Electrode plate structureLevel 8
Vacuum pump systemTwo-stage oil rotary vane vacuum pump, Roots vacuum pump set
Vacuum measurement systemPirani Resistance Vacuum Gauge
Gas measurement systemHigh Precision Mass Flow Meter
Plasma generatorHigh Precision 0-500W Plasma GeneratorHigh precision 0-1000W plasma Generator
Plasma matcherHigh Precision 0-500W Automatic MatcherHigh precision 0-1000W automatic matcher
Working vacuum10-100Pa
Vacuum pump ultimate pressure5×10-1Pa
Vacuum time≤55S≤70S≤80S≤100S
Vacuum breaking time≤15S≤20S≤25S≤30S
Gas control rangeMass flow 0-300SCCM (optional)Mass flow 0-500SCCM (optional)
RF power0-500W (adjustable within the range)0-1000W (adjustable within the range)
Operating modeManual pick and place, one-key automatic operation
Power supplyThree-phase 380V
Total power4KW4.5KW



Guangdong Anda Automation Solutions Co., Ltd.
Address:No. 17, Xiangxidong District Road, Liaobu Town, Dongguan City, Guangdong Province
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