VP Series Plasma Cleaner
VP-10S Automatic Plasma Cleaner for Semiconductor
Designed for semiconductor packaging industry substrates and lead frames plasma cleaning process.
Typical applications：
1> Plasma treatment before wire bonding on semiconductor package substrates and lead frames
2> Plasma treatment before prefill on packaged chips
3> Pre-Mold Plasma Treatment of Semiconductor Package Substrates and Leads
4> Plasma treatment of semiconductor package substrates and lead frames to improve adhesion
5> Remove/reduce oxide layer on leads
| Functional configuration | Technical parameter | |
| Equipment size | L x W x H | L=1700, W=1200, H=1654 (mm) |
| Net weight | 1.0T | |
| Equipment perimeter clearance | 600MM on the back, 600MM on both sides | |
| Chamber | Volume | 9L |
| Channel | 4 | |
| Electrode number | 2pcs | |
| Load method | Magazine | |
| Adapt to product size | Width: 40-100mm, Length: 150-300mm | |
| Electrode | Electrode size | 528x300mm |
| RF generator | Standard power | 4KW |
| Frequency | 13.56MHz | |
| Gas control | Supports up to three channels | Standard 2 channels, optional 3 channels |
| Control system | HMI | PC + touch screen |
| Remote interface | Communication | Optional |
| Vacuum pump | Optional dry pump | 17CFM |
| Optional oil pump | 195CFM | |
| Optional dry pump with purge function | YES | |
| Nitrogen purge flow | 2SLM | |
| Evacuation time | 10-15S | |
| Vacuum breaking time | 3-4S | |
| Factory facilities | Power supply | AC380V 50/60HZ 4KW (Oil pump) / AC380V 50/60HZ 0.6KW(Dry pump) |
| Process Gas Line Size & Type | 1/4 inch Swagelok | |
| Process gas purity | Industrial grade and above | |
| Process gas pressure | 10-20psig | |
| Purge Gas Line Size & Type | 1/4inch Swagelok | |
| Purging gas purity | Industrial grade and above | |
| Purge gas pressure | 15psig | |
| Pneumatic Valve Line Size & Type | 10mm push-inftting | |
| Pneumatic gas purity | Compressed air, oil-free, dew point <=7C, particles <5 | |
| Pneumatic gas pressure | 70-90psig | |
| Compressed air exhaust line | 10mm | |
| Compliance | Certification | SEMI |
| Auxiliary equipment | Nitrogen generator (optional) | Optional when nitrogen purging function is required |
| Chiller (optional) | Optional when configuring the cooling function electrode | |
| Hydrogen Kit (Optional) | Optional when processing with hydrogen | |
| Exhaust gas processor (optional) | Tail gas treatment option for fluorine-containing gas treatment | |
| Transportation | Gross weight | 1.0T |
| Number of packages | 1 | |
| Packaging is SPM15 compliant | YES | |
