Supporting multiple versions (PLC/PC) and various mainstream communication protocols;
Design and production performed in accordance with SEMI safety production standard;
High channel design capacity, UPH400~550pcs;
Suitable for multiple product dimensions and magazines;
MFC wafer level patented design, preventing gas leakage from causing safety accidents (supporting high-risk gases such as hydrogen);
Patented design of high sealing chamber, up to 5pa;
Water contact angle<10° (related to the material of product surface);
Design of four channels for simultaneous processing of 4 products, with dual bottom electrodes, reducing the time for board entry and exit, significantly improving efficiency, and ensuring product uniformity in processing.
| Functional Configuration | Technical Parameters | |
| L×W×H(mm) | L1600×W1150×H1700 | |
| Equipment Dimension | Net weight(kg) | 1000 |
| Peripheral clearance(mm) | 600 at the back,600 on both sides | |
| Chamber | Volume(L) | About 9 |
| Channel(nos.) | 4 | |
| Bottom electrode(pcs.) | 2(transition function) | |
| Feeding mode | Magazine | |
| Adaptive product dimension(mm) | Width:40-100 Length:150-300 | |
| Electrode | Electrode dimension(mm) | 528×300 |
| RF power supply | Standard power(kW) | 1 |
| Frequency(MHZ) | 13.56 | |
| Gas control | Up to three channels | 2 channels(standard),3 channels(optional) |
| Control system | Human-machine interface | PC+touch screen |
| Remote interface | Communication | Optional |
| Vacuum pump | Optional dry pump | 17CFM |
| Optional oil pump | 195CFM | |
| Optional dry pump with purging function | YES | |
| Nitrogen purging flow rate (SLM) | 2 | |
| Vacuuming time(S) | 10月15日 | |
| Vacuum breaking time(S) | 3-4 | |
| Factory facilities | Power supply | Three-phase 380V50/60Hz 4.5kW(oil pump) three-phase380V50/60Hz 4kW(dry pump) |
| Dimension & type of process gas pipeline | 1/4inch Swagelok | |
| Purity of process gas | Industrial grade and above | |
| Pressure of process gas(psig) | 10-20 | |
| Dimension &type of purging gas pipeline | 1/4inch Swagelok | |
| Purging gas purity | Industrial grade and above | |
| Pressure of purging gas(psig) | 15 | |
| Dimension &type of pneumatic valve pipeline | 10mm push-in fitting | |
| Purity of pneumatic gas | Compressed air,oil-free,dew point≤7℃,particles<5 | |
| Pressure of pneumatic gas(psig) | 70-90 | |
| Compressed air(mm) | ∅8 | |
| Compliance | Certification | SEMI |
| Ancillary equipment | Nitrogen generator(optional) | Optional for nitrogen purging |
| Water cooler(optional) | Optional for electrodes cooling | |
| Hydrogen kit(optional) | Optional for hydrogen treatment | |
| Exhaust gas processor(optional) | Optional for fluorine exhaust treatment | |
| Transportation | Total weight(kg) | 1050 |
| Number of packages | 1 | |
| Packaging in line with SPM15 standard | YES | |
